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Become a CNS User Equipment Training Events Virtual Tour User Info User Portal Staff MENU Harvard CNS Facilities Nanofabrication Cambridge: Imaging & Analysis Allston: Imaging & Analysis Virtual Visit Tool Search User Info Overview User Policy & Info User Fees Billing Policy Citing the CNS Forms Safety Nanofabrication Facility Use Imaging & Analysis Facility Use Locker Program CNS Info About CNS Featured Research Quantum@Harvard Publications Presentations Open Positions About Overview Administrative Office CNS Core Mission NNCI Get In Touch Visiting CNS Contact Staff Directory Become a CNS User Logins doubleArrow-right Admin Staff Intranet Training Events CNS User Portal The Center for Nanoscale Systems is a shared use core facility at Harvard University. Our scientific focus is the study, design, and fabrication of nanoscale structures and their integration into large and complex interacting systems. Virtual Tour of CNS The Center for Nanoscale Systems is a shared use core facility at Harvard University. Our scientific focus is the study, design, and fabrication of nanoscale structures and their integration into large and complex interacting systems. CNS Facilities Two sites. Three exceptional research resources. Cambridge: Nanofabrication The Center for Nanoscale Systems’ Nanofabrication Facility, provides resource and staff support for fabricating and characterizing nanoscale devices and structures. Read Overview Cambridge: Imaging and Analysis The Cambridge image and analysis team provide a wide range of tools, training and expertise focused on electron microscopy, optical microscopy, and x-ray analyses Read Overview Allston: Imaging and Analysis Our Allston SEC core laboratory spaces provide equipment and staff expertise in materials characterization, electron microscopy and soft lithography. Read Overview Events View Calendar Disco DAD-3221 Automatic Dicing Saw Training Part 1-Basic Operation May 14 11:00 AM - 12:00 PM Jason Tresback LISE G07 CNS cleanroom orientation May 15 9:30 AM - 11:00 AM John Tsakirgis Meet in front od G07. Denton E-beam Evaporator (EE-4) training May 16 1:00 PM - 2:00 PM Ed Macomber SEM-EDS Training May 17 10:00 AM - 12:00 PM Tim Cavanaugh LISE B15H AB-2 RCA Cleaning Wet Process Station May 21 1:00 PM - 2:00 PM Bok Yeop Ahn G07, acid bay in the cleanroom News 19 Mar, 2024 CNS Spring Seminar Series Semiconductor Bio-interface for DNA Data Storage Dr. Woo-Bin Jung, Harvard University Semiconductor Bio-Interface for Functional Synaptic Connection Mapping Dr. Jung Wang, Harvard University March 22, 2024 | 12pm – 1pm | LISE 303 About Speakers: Dr. Woo-Bin Jung and Dr. Jun Wang are postdoctoral fellows in Prof. Donhee Ham’s Lab, Harvard University. [+MORE] 13 Mar, 2024 Special CNS Seminar: Three Cyclic Plasma Processes: ALE, DRIE, & ALD Marco Volleth, Sentech Instruments GmbH March 15, 2024 | 12pm – 1pm | LISE 303 Abstract: For some time now, plasma processes have not only been carried out continuously, but also used in a cyclical manner. The best-known process of this type is the so-called Bosch process for deep etching of silicon (DRIE). There is also atomic layer deposition (ALD) for depositing very thin layers with high precision and conformality. The equivalent etching process, called atomic layer etching (ALE), is used in more and more applications. In the lecture, these three cyclic plasma processes will be examined in more detail and applications will be shown using examples from SENTECH customers and our application lab. About Speaker: Marco Volleth studied nanotechnology with a bachelor’s degree at the Friedrich-Alexander University of Erlangen from 2013 until 2017, followed by a master’s degree in Electrical and Microsystems Engineering at the University of Applied Sciences in Regensburg (both Germany). The main focus of his studies was in the areas of lithography and reactive ion etching, especially for the two-material systems silicon and gallium nitride. Since October 2020 he is working as an Application Engineer for plasma etching at SENTECH Instruments in Berlin, Germany. SENTECH is a manufacturer of plasma process systems and devices for thin-film metrology. [+MORE] Recent Publications A new metamaterial for MRI-safe deep brain stimulation leads Francesca Marturano*, Laleh Golestanirad, Giorgio Bonmassar 10.1109/ICEAA57318.2023.10297949 Scanning multiprobe microscopy for mesoscopic devices and materials: Part II Patrick Forrester, EliseAnne Koskelo, Yuan Cao, Pengjie Wang, Myungchul Oh, Zhuozhen Cai, Yonglong Xie, Jiachen Yu, Martin Gustafsson, Ali Yazdani, Amir Yacoby Bulletin of the American Physical Society, 2024 Scanning multiprobe microscopy for mesoscopic devices and materials: Part I EliseAnne Koskelo, Patrick Forrester, Yuan Cao, Pengjie Wang, Myungchul Oh, Zhuozhen Cai, Yonglong Xie, Jiachen Yu, Martin Gustafsson, Ali Yazdani, Amir Yacoby Bulletin of the American Physical Society, 2024 Reconfigurable photonic integrated circuits based on liquid-crystal-cladded slab waveguides Ayyoub Dehmollaian, Andrew McClung, Babak Mirzapourbeinekalaye, Amir Arbabi https://spie.org/photonics-west/presentation/Reconfigurable-photonic-integrated-circuits-based-on-liquid-crystal-cladded-slab/12890-52 Observation of Electronic Viscous Dissipation in Graphene Magneto-thermal Transport Jonah Waissman, Artem V Talanov, Aaron Hui, Zhongying Yan, Terry Phang, Kenji Watanabe, Takashi Taniguchi, Brian J Skinner, Philip Kim APS March Meeting 2024, Abstract: M07.00008 Ecological and phylogenetic signals in catarrhine root morphology Zana R. Sims Conference presentation, American Association of Biological Anthropologists Time-stepped optical frequency comb laser design leveraging three-dimensional integration of thin-film lithium niobate and silicon CMOS Georgios Kyriazidis, Norman Lippok, John Davis, Xinrui (Anna) Zhu, Hana Warner, Yaowen Hu, Marko Loncar, Benjamin Vakoc, Gage Hills https://spie.org/photonics-west/presentation/Time-stepped-optical-frequency-comb-laser-design-leveraging-three-dimensional/12890-34 Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios Gabriel Giribaldi, Luca Colombo, Pietro Simeoni, Matteo Rinaldi Giribaldi, G., Colombo, L., Simeoni, P. et al. Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios. Nat Commun 15, 304 (2024). https://doi.org/10.1038/s41467-023-44038-9 Staphylococcus aureus AbcA transporter enhances persister formation under β-lactam exposure Q. C. Truong-Bolduc,1 Y. Wang,1 R. Ferrer-Espada,2 J. L. Reedy,1 A. T. Martens,2 Y. Goulev,2 J. Paulsson,2 J. M. Vyas,1 D. C. Hooper1 Truong-Bolduc et al., Staphylococcus Aureus AbcA Transporter Enhances Persister Formation under β-Lactam Exposure.” Fractional quantum anomalous Hall effect in multilayer graphene Zhengguang Lu, Tonghang Han, Yuxuan Yao, Aidan P. Reddy, Jixiang Yang, Junseok Seo, Kenji Watanabe, Takashi Taniguchi, Liang Fu & Long Ju Lu, Z., Han, T., Yao, Y. et al. Fractional quantum anomalous Hall effect in multilayer graphene. Nature 626, 759–764 (2024). https://doi.org/10.1038/s41586-023-07010-7 [+MORE] WILLIAM WILSON EXECUTIVE DIRECTOR Directors Welcome The Center for Nanoscale Systems (CNS) at Harvard University was created with a very clear vision: To provide a collaborative multi-disciplinary research environment to support of the creation and evolution of world-class nanoscience and technical expertise, for the Harvard research community as well as the larger community of external researchers both from academia and industry. Our Core Values: Facilitating leading-edge, multi-disciplinary, research a [+MORE] ROBERT WESTERVELT DIRECTOR Overview Video x Quick links doubleArrow-right Become a user Equipment Training Events User Info User Portal Admin Staff Intranet Harvard CNS Logo Center for Nanoscale Systems Laboratory for Integrated Science and Engineering Digital Accessibility Policy Safety at Our Facility © 2024 Harvard CNS. All rights reserved....